scia systems , Germany

scia systems (Ion Beam Systems)

The scia systems GmbH manufactures of advanced ion beam and plasma processing equipment, for the production of microelectronics, MEMS and precision optical components, in both, high volume production as well as applications in research and development. scia Systems provides highly reliable tools together with a superior technology support..

The process systems address the entire spectrum in ion beam technology and are available with special source arrangements on platforms that accommodate all standard wafer sizes. The tools are flexible and modular in design. Several vacuum process chambers can be combined into cluster or in-line solutions, according to customer-specific requirements


Technology Profilo:

  • Ion Beam Etching and Milling (IBE/IBM)
  • Ion Beam Trimming (IBT)
  • Physical Vapor Deposition (PVD)
  • Dual Ion Beam Deposition (DIBD)
  • Reactive Ion Etching (RIE)
  • Plasma Enhanced Chemical Vapor Deposition (PECVD)
  • Plasma Cleaning


Download Product Brochures

  • Ion Beam Deposition Systems
  • scia Coat 200
  • scia Coat 500
  • Ion Beam Etching Systems
  • scia Mill 150
  • scia Mill 200